PATTERN TRANSFER DEVICE, PATTERN TRANSFER METHOD, AND CIRCULAR RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To exactly transfer a fine irregular pattern of a mold to a substrate after alignment of the substrate to the mold is exactly performed and to smoothly and reliably peel the substrate from the mold without damaging the mold and the substrate. SOLUTION: In a center hole 1a of the mold 1 held by an upper side pressurizing plate 18, large diameter arc parts 1aL and small diameter arc parts 1aS having the same diameter as a center hole 2a of the substrate 2 are formed alternately for every 60°angle. When three chucking claws 33 of a chucking member 30 are made to abut on the small diameter arc parts 1aS of the mold 1 and the center hole 2a of the substrate 2, alignment can be performed so that the substrate 2 is centered to the mold 1. After transfer of the substrate 2 is completed, the chucking claws 33 are made to face to the large diameter arc parts 1aL of the mold 1 and abut on the inner surface of the center hole 2a of the substrate 2 and the substrate is separated from the upper side pressurizing plate 18 to peel the substrate 2 from the mold 1. COPYRIGHT: (C)2008,JPO&INPIT