| 摘要 |
PROBLEM TO BE SOLVED: To perform gas purge of a substrate housing container efficiently in a short time.SOLUTION: In the substrate housing container formed from a container body and a lid body, a purge gas supplied from a supply hole (45) on a lower wall of the container body is controlled by a gas emission control mechanism (101) having a predetermined height from the lower wall to an upper wall, and emitted from an opening to a center of a wafer W and to a first sidewall (25) and a second sidewall (26) of the container body, and the purge gas emitted in the direction of the sidewalls is controlled by a gas control part (51) that is disposed on the sidewall, such that the mechanism efficiently performs the gas purge.SELECTED DRAWING: Figure 3 |
