| 发明名称 |
APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY |
| 摘要 |
Provided is an apparatus for optical emission spectroscopy. The apparatus for the optical emission spectroscopy includes a light collection unit configured to collect light within a plasma process chamber in which plasma is generated to process a substrate, a light transmission unit configured to transmit the collected light, and an analysis unit configured to analyze the light provided through the light transmission unit, thereby analyzing a plasma state. The light collection unit includes a light collection part configured to concentrate the light generated in the plasma process chamber and provide the concentrated light to the light transmission unit. |
| 申请公布号 |
US2016216155(A1) |
申请公布日期 |
2016.07.28 |
| 申请号 |
US201615008856 |
申请日期 |
2016.01.28 |
| 申请人 |
Industry-Academic Cooperation Foundation, Yonsei University |
发明人 |
YUN Ilgu;LEE Sang Myung |
| 分类号 |
G01J3/443;C23C16/50;H01J37/32 |
主分类号 |
G01J3/443 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for optical emission spectroscopy, comprising:
a light collection unit configured to collect light within a plasma process chamber in which plasma is generated to process a substrate; a light transmission unit configured to transmit the collected light; and an analysis unit configured to analyze the light provided through the light transmission unit, thereby analyzing a plasma state, wherein the light collection unit comprises a light collection part configured to concentrate the light generated in the plasma process chamber and provide the concentrated light to the light transmission unit. |
| 地址 |
Seoul KR |
