| 摘要 |
The present invention relates to a susceptor and a temperature variable apparatus thereof and, more specifically, to a susceptor and a temperature variable apparatus thereof which uniformly maintains the temperature of the susceptor by varying the temperature of cold and heat media supplied to the susceptor according to the sensed temperature of the susceptor and supplying the cold and heat media to the susceptor. To achieve this, the susceptor comprises: a resistance heating element which is formed in either a single area or multi areas and heats a substrate by varying the temperature of heat media according to the supply of power; and a temperature variable cooling part which cools the resistance heating element by cooling media or heats the resistance heating element by heating media by supplying the temperature varied cold and heat media having a relatively preset temperature variation on the basis of the temperature sensed in the resistance heating element area. |
