| 摘要 |
A suction port 15 of a suction duct 12 corresponding to a tray vent hole 4 at a position, at which a drying target object W1 is not mounted, is covered with a first resistant lid R1 in which a first vent hole 17a is formed and hot air circulates through the first vent hole 17a. In the suction duct 12 corresponding to the tray vent hole 4 at a position at which a drying target object W1 is mounted, hot air flows through a first gap S1 formed between the first resistant lid R1 and the suction port 15, and does not pass through the first vent hole 17a of the first resistant lid R1. In other words, air resistance of the first vent hole 17a is set to be the same as air resistance of the drying target object W1, thereby it is possible for the same amount of hot air to pass through any one of the tray vent holes 4 and it is possible to perform the drying under the same condition as in a case where a drying process is performed on the maximum number of drying target objects. |
