发明名称 FABRICATING NON-VOLATILE MEMORY WITH DUAL VOLTAGE SELECT GATE STRUCTURE
摘要 A select gate structure for a non-volatile storage system include a select gate and a coupling electrode which are independently drivable. The coupling electrode is adjacent to a word line in a NAND string and has a voltage applied which reduces gate induced drain lowering (GIDL) program disturb of an adjacent unselected non-volatile storage element. In particular, an elevated voltage can be applied to the coupling electrode when the adjacent word line is used for programming. A reduced voltage is applied when a non-adjacent word line is used for programming. The voltage can also be set based on other programming criterion. The select gate is provided by a first conductive region while the coupling electrode is provided by a second conductive region formed over, and isolated from, the first conductive region.
申请公布号 US2008090351(A1) 申请公布日期 2008.04.17
申请号 US20060550386 申请日期 2006.10.17
申请人 MOKHLESI NIMA;HIGASHITANI MASAAKI 发明人 MOKHLESI NIMA;HIGASHITANI MASAAKI
分类号 H01L21/336 主分类号 H01L21/336
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