发明名称 PURGE DEVICE AND PURGE METHOD
摘要 A purge apparatus is a purge apparatus that purges an inside of a storage container in which a product is stored, with a purge gas. The purge apparatus includes a discharge pipe that connects to a discharge port of the storage container to discharge the purge gas inside the storage container, a meter that measures an exhaust flow rate that is a flow rate of the purge gas flowing through the discharge pipe when the purging is carried out, and a detector that determines whether the purging is satisfactory, based on the exhaust flow rate measured by the meter.
申请公布号 US2016351427(A1) 申请公布日期 2016.12.01
申请号 US201415116527 申请日期 2014.12.17
申请人 MURATA MACHINERY, LTD. 发明人 MURATA Masanao;YAMAJI Takashi
分类号 H01L21/673;B08B9/08;B08B5/04;H01L21/67 主分类号 H01L21/673
代理机构 代理人
主权项
地址 Kyoto-shi JP