| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming liquid repellent film capable of forming the liquid repellent film on the front surface of a nozzle plate including the peripheral edge part of ejection hole opening part without heating the nozzle plate nor imparting liquid repellency to the rear surface of the nozzle plate and the inner wall of the ejection hole. SOLUTION: A silane compound solution is applied on the nozzle plate 21 to form a silane compound solution layer 31 on it. Then, ultraviolet rays 35 is radiate the silane compound solution layer 31 to solidify the layer 31 formed on the front surface 22 of the nozzle plate to form the liquid repellent film 40. Furthermore, the nozzle plate 21 is cleaned using an solvent to remove unsolidified silane compound solution layer 31 on the nozzle plate rear face 23 and ejection hole inner wall 25 which is not in radiated with the ultra violet rays 35. COPYRIGHT: (C)2006,JPO&NCIPI
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