发明名称 Die Bonder and Methods of Using the Same
摘要 A method includes bringing into contact respective first sides of a plurality of dies and a die attach film on a major surface of a carrier wafer, and simultaneously heating portions of the die attach film contacting the plurality of dies in order to simultaneously bond the plurality of dies to the die attach film.
申请公布号 US2016190088(A1) 申请公布日期 2016.06.30
申请号 US201514686142 申请日期 2015.04.14
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Yu Chen-Hua;Chen Shing-Chao;Liu Chung-Shi;Cheng Ming-Da
分类号 H01L23/00;B32B38/18;B32B37/00;B32B37/06;H01L21/67;H05K13/04 主分类号 H01L23/00
代理机构 代理人
主权项 1. A method comprising: bringing into contact respective first sides of a plurality of dies and a die attach film on a major surface of a carrier wafer; and simultaneously heating portions of the die attach film contacting the plurality of dies in order to simultaneously bond the plurality of dies to the die attach film.
地址 Hsin-Chu TW