| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric device by which variation in resonance frequency of the piezoelectric device over time is reduced. <P>SOLUTION: The method of manufacturing the piezoelectric device comprises: an element mounting step of mounting a piezoelectric vibrating element 35 having an exciting electrode 36 formed on a surface of a piezoelectric substrate made of a piezoelectric material into a container 30 having a communicative holes 38 with a conductive adhesive 37; a frequency adjusting step of adjusting the resonance frequency of the piezoelectric vibrating element 35; a lid joining step of joining the container 30 and lid 40 together; a gas introducing step of introducing gaseous mixture of gas having a non-bonding pair and inert gas in a space part defined by the container 30 and lid 40 from the communicative holes 38; and a sealing step of airtightly sealing the space part 48 by irradiating a sealing member 39 disposed in the communicative holes 38 of the container 30 with laser beam to close the communicative holes 38. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
