发明名称 SURFACE TREATMENT METHOD AND SURFACE TREATMENT DEVICE
摘要 A surface treatment method includes: roughening a surface region of a substrate corresponding to a through hole provided to a masking plate by supplying a solvent to a solid electrolyte film from a second surface of a masking plate through the through hole, in a state where: a first surface of the solid electrolyte film is arranged directly on the surface of the substrate; and a first surface of the masking plate is arranged directly on a second surface of the solid electrolyte film, wherein the supplied solvent penetrates the solid electrolyte film, and dissolves the surface of the substrate.
申请公布号 US2016160378(A1) 申请公布日期 2016.06.09
申请号 US201514955791 申请日期 2015.12.01
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 SATO Yuki;HIRAOKA Motoki;YANAGIMOTO Hiroshi
分类号 C25F3/14;C25D5/02;C25D17/00;C25F7/00 主分类号 C25F3/14
代理机构 代理人
主权项 1. A surface treatment method comprising roughening a surface region of a substrate corresponding to a through hole provided to a masking plate by supplying a solvent to a solid electrolyte film from a second surface of the masking plate through the through hole, in a state where a first surface of the solid electrolyte film is arranged directly on the surface of the substrate, and a first surface of the masking plate is arranged directly on a second surface of the solid electrolyte film, wherein the supplied solvent penetrates the solid electrolyte film, and dissolves the surface of the substrate.
地址 Toyota-shi JP