| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas radiation detector that is constituted by a micro pattern, has a high gas amplification factor, and operates stably. SOLUTION: The gas radiation detector with a micro mesh and pixel-type electrode includes an anode 12 formed on the backside of a double-sided substrate 11, a cylindrical anode electrode 13 that is planted in the anode 12 and whose upper end surface is exposed from the surface of the double-sided substrate 11, a cathode electrode 14 having holes 16 formed around the upper end surface of the cylindrical anode electrode 13, and a mesh electrode 15 arranged in parallel at a predetermined interval on the surface of the double-sided substrate 11. COPYRIGHT: (C)2008,JPO&INPIT
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