| 摘要 |
PROBLEM TO BE SOLVED: To provide a lithographic projection apparatus that includes a table, a shutter member, a fluid handling structure, and a fluid extraction system.SOLUTION: The fluid handling structure is configured to supply and confine liquid between a projection system and one of (i) a substrate, (ii) the substrate table, (iii) a surface of the shutter member, and (iv) any combination selected from (i)-(iii). The surface of the shutter member adjoins and is coplanar with a surface of the table. The surfaces of the shutter member and the table may be separated by a gap. The fluid extraction system is configured to remove liquid from the gap.SELECTED DRAWING: Figure 12 |
