发明名称 |
WAFER CONTAINER WITH CROSS-SLOTTING PROTECTION |
摘要 |
A front opening wafer container has a container portion and a door sized to close an open front of the container portion. The container portion has shelves for holding wafers defining a shelf seating position and has forward and rearward wafer supports to suspend wafers therebetween in a transport seating position above the shelf seating position. Shock condition projections are arranged adjacent the transport seating position of the wafers for protecting the wafers during a shock condition. The projections may be unitary with the chassis of the front door and the container portion back wall. |
申请公布号 |
WO2016154536(A1) |
申请公布日期 |
2016.09.29 |
申请号 |
WO2016US24213 |
申请日期 |
2016.03.25 |
申请人 |
ENTEGRIS, INC. |
发明人 |
ANDERSEN, Christian;JOHNSON, Michael, L.;ZABKA, Michael |
分类号 |
H01L21/673;H01L21/677 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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