发明名称 WAFER CONTAINER WITH CROSS-SLOTTING PROTECTION
摘要 A front opening wafer container has a container portion and a door sized to close an open front of the container portion. The container portion has shelves for holding wafers defining a shelf seating position and has forward and rearward wafer supports to suspend wafers therebetween in a transport seating position above the shelf seating position. Shock condition projections are arranged adjacent the transport seating position of the wafers for protecting the wafers during a shock condition. The projections may be unitary with the chassis of the front door and the container portion back wall.
申请公布号 WO2016154536(A1) 申请公布日期 2016.09.29
申请号 WO2016US24213 申请日期 2016.03.25
申请人 ENTEGRIS, INC. 发明人 ANDERSEN, Christian;JOHNSON, Michael, L.;ZABKA, Michael
分类号 H01L21/673;H01L21/677 主分类号 H01L21/673
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