| 摘要 |
<P>PROBLEM TO BE SOLVED: To hold down a usage of a resin tube for supplying a cooling medium to a component having a cooling portion. <P>SOLUTION: A stage base 50 comprises: a plate for supporting a stage; a component 1 having a cooling portion which is disposed on the plate; and a passage 41 for a cooling medium so disposed as to reach the inside of the component 1 through the plate. <P>COPYRIGHT: (C)2009,JPO&INPIT |
