发明名称 |
Internal member for plasma-treating vessel and method of producing the same |
摘要 |
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al<SUB>2</SUB>O<SUB>3 </SUB>film formed on the undercoat as a middle layer and Y<SUB>2</SUB>O<SUB>3 </SUB>sprayed coating formed on the middle layer as a top coat.
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申请公布号 |
US2008070051(A1) |
申请公布日期 |
2008.03.20 |
申请号 |
US20070882462 |
申请日期 |
2007.08.01 |
申请人 |
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发明人 |
HARADA YOSHIO;TAKEUCHI JUNICHI;NAGAYAMA NOBUYUKI;MITSUHASHI KOUJI |
分类号 |
B32B15/04;B05D1/36;C09D1/00;C23C4/10 |
主分类号 |
B32B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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