ACOUSTIC WAVE FILTER, DUPLEXER, AND MODULE

摘要

A filter including: a substrate; an input pad; an output pad; a ground pad; a plurality of first acoustic wave resonators formed on the substrate, and connected in series between the input pad and the output pad; a plurality of second acoustic wave resonators, each comprising: a piezoelectric film on the substrate; a lower electrode between the substrate and the piezoelectric film, connected to the ground pad; and a upper electrode on the piezoelectric film, and connected between an adjacent pair of the first acoustic wave resonators or between one of the plurality of first acoustic wave resonators and one of the input and the output pad.

主权项

1. A filter comprising:
a substrate; an input pad; an output pad; a ground pad; a plurality of first acoustic wave resonators formed on the substrate, and connected in series between the input pad and the output pad; a plurality of second acoustic wave resonators, each comprising:
a piezoelectric film on the substrate;a lower electrode between the substrate and the piezoelectric film, connected to the ground pad; andan upper electrode on the piezoelectric film, and connected between an adjacent pair of the first acoustic wave resonators or between one of the plurality of first acoustic wave resonators and one of the input and the output pad.