FOCUS RING FIXING APPARATUS OF DRY ETCHING CHAMBER,申请号KR20040104484-传众专利搜索

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发明名称	FOCUS RING FIXING APPARATUS OF DRY ETCHING CHAMBER
摘要
申请公布号	KR20060065373(A)	申请公布日期	2006.06.14
申请号	KR20040104484	申请日期	2004.12.10
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HEO, SUNG TAE
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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