ПЛАЗМЕННАЯ СОПЛОВАЯ РЕШЕТКА ДЛЯ ОБЕСПЕЧИВАНИЯ ГЕНЕРИРОВАНИЯ ОДНОРОДНОЙ РАСШИРЯЮЩЕЙСЯ МИКРОВОЛНОВОЙ ПЛАЗМЫ

摘要

The present invention provides microwave plasma nozzle array systems ( 10, 70, 230 , and 310 ) and methods for configuring microwave plasma nozzle arrays ( 37, 99 , and 337 ). The microwaves are transmitted to a microwave cavity ( 323 ) in a specific manner and form an interference pattern ( 66 ) that includes high-energy regions ( 69 ) within the microwave cavity ( 32 ). The high-energy regions ( 69 ) are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements ( 36 ) is provided in the array ( 37 ). Each of the nozzle elements ( 36 ) has a portion ( 116 ) partially disposed in the microwave cavity ( 32 ) and receives a gas for passing therethrough. The nozzle elements ( 36 ) receive microwave energy from one of the high-energy regions ( 69 ). Each of the nozzle elements ( 36 ) includes a rod-shaped conductor ( 114 ) having a tip ( 117 ) that focuses on the microwaves and a plasma ( 38 ) is then generated using the received gas.