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发明名称
Wafer area pressure control
摘要
申请公布号
EP1362362(B1)
申请公布日期
2009.12.09
申请号
EP20010959386
申请日期
2001.07.31
申请人
LAM RESEARCH CORPORATION
发明人
HAO, FANGLI;LENZ, ERIC;MOREL, BRUNO
分类号
H01J37/32;H01L21/3065
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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