发明名称 |
VERTICAL HEAT TREATMENT APPARATUS AND METHOD FOR OPERATING SAME |
摘要 |
A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts. Either one of the loading and unloading parts 3, 4 is utilized as a third storage part 30 that stores a carrying container 2. The carrying container storage capacity may be increased and the throughput may be improved. |
申请公布号 |
EP1811558(A4) |
申请公布日期 |
2008.09.10 |
申请号 |
EP20050793489 |
申请日期 |
2005.10.17 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
HARAKI, KENJIRO;YAMAMOTO, HIROYUKI;UEMURA, SATOSHI;TSUNODA, YUJI;TAKEUCHI, YASUSHI;KANEKO, HIROFUMI |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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