Spectroscopic measurement device having transmissive optical member with a sloped face

摘要

A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.

主权项

1. A spectroscopic measurement device, comprising:
a) a transmissive optical member composed of a first transmissive part having an entrance face and an exit face parallel to each other and a second transmissive part located next to the first transmissive part and having an entrance face and an exit face one of which is sloped relative to the other, with either the entrance face or the exit face of the second transmissive part lying on a same plane as either the entrance face or the exit face of the first transmissive part; b) an objective lens for collimating a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured and for making the collimated beam enter the first transmissive part and the second transmissive part; c) a cylindrical lens having an axis parallel to a line of intersection of the entrance face of the first transmissive part and a boundary surface between the first transmissive part and the second transmissive part, for receiving a first measurement beam exiting from the first transmissive part and a second measurement beam exiting from the second transmissive part; d) a detector, including a plurality of pixels, that detects an intensity distribution of an interference light produced from the first measurement beam and the second measurement beam entering the cylindrical lens; and e) a processor for acquiring an interferogram of the measurement points of the object to be measured based on the intensity distribution of the interference light detected by the detector, and for Fourier-transforming the interferogram to obtain a spectrum.