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发明名称
FORMATION OF SELECTIVE ETCHING MASK
摘要
申请公布号
JPS52154364(A)
申请公布日期
1977.12.22
申请号
JP19760071071
申请日期
1976.06.18
申请人
HITACHI LTD
发明人
TAMAOKI YOUICHI;HONMA KOUJI;NANBA MITSUO;UEHARA KEIJIROU;HIGUCHI HISAYUKI;MAKI MICHIYOSHI
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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