| 摘要 |
PROBLEM TO BE SOLVED: To provide a method to observe easily a defect of a stamper for imprinting with a minute unevenness structure that cycle is smaller than the wavelength of visible light.SOLUTION: In an observation method of a transcription surface of a replica copied from a die with a minute unevenness structure that cycle is smaller than the wavelength of visible light, the transcription surface which the minute unevenness structure is not copied to the transcription surface of the replica is observed.SELECTED DRAWING: Figure 1 |
