| 摘要 |
PURPOSE:To improve the propagating characteristic of a magnetic bubble by dividing a soft magnetic substance pattern forming process so as to eliminate entirely the occurrence of 'drooping' or 'wall'. CONSTITUTION:The soft magnetic substance pattern forming process is divided into two at the preceding and succeeding location of a spacer layer forming process, an information storage pattern 22 is formed in the soft magnetic substance pattern forming before the spacer layer forming process, a function gate pattern 21 and a connection pattern 23 are formed in the soft magnetic pattern forming after the spacer layer forming process to interpose a spacer layer 42 between the soft magnetic substance pattern constituting the function gate pattern 21 and the connection pattern 23 and the soft magnetic pattern constituting the information storage pattern 22. Thus, the step difference in forming each soft magnetic pattern is decreased and 'drooping' or 'wall' blocking smooth transfer of a magnetic bubble is eliminated to improve the propagation characteristic of the magnetic bubble in the magnetic bubble memory element.
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