| 摘要 |
PURPOSE:To obtain complete parallel scanning light beams of high accuracy without necessitating an expensive collimating lens at all, by radiating a light beam to two pieces of large and small mirrors opposed in parallel, which are coupled to a driving motor and rotated and moved. CONSTITUTION:The titled device is constituted of a first mirror 12 placed in an optical path of a light beam generated from a light emission source 11, a second mirror 12 which has been placed on an optical path of a reflected light beam reflected by this first mirror so that its reflecting surface is opposed to the reflecting surface of the first mirror, and a driving motor 15 for rotating and moving in parallel this second mirror and the first mirror. An incident angle phi2 to the second mirror 13 of a reflected light beam b2 emitted from the first mirror 12 is varied, and as a result, a position of parallel scanning light beams b3 from the second mirror 13 is varied, therefore, a parallel scanning luminous flux 19 is formed and a scanning area (d) by this parallel scanning luminous flux 19 becomes (d)=2r sintheta. In such a way, the measurement accuracy can be raised without necessitating a collimating lens, and a miniature and inexpensive device is obtained.
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