| 摘要 |
PURPOSE: To improve the flatness of a device by using a flattening material having a specific viscosity and setup characteristic in a stage before the device is solidified in layer forming treatment. CONSTITUTION: A liquid film which contains an optical initiator, Irgacure 651 (1,1-dimethoxy acetophenone), by about 5wt.% and has a viscosity of 30-1,000ct and a thickness of 3μm is formed on a substrate by spin-coating trimethylolpropane trimethacrylate(TMP TMA) having a volume reduction rate of <=20% on the substrate for 50 seconds at a number of rotation of 3,000rpm. A gap constituent on the substrate is flattened while the substrate is stationarily maintained in a horizontal attitude for 10 minutes. Then the liquid film is cured by exposing the film to ultraviolet rays emitted from a high-voltage mercury lamp in a nitrogen atmosphere.
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