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发明名称
摘要
申请公布号
JPH0370328(B2)
申请公布日期
1991.11.07
申请号
JP19820093135
申请日期
1982.06.02
申请人
HITACHI LTD
发明人
KUMOCHI TAKAAKI
分类号
C23C14/14;B01J19/08;H01B5/14;H01B13/00
主分类号
C23C14/14
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