Stacked multi-poly spacers with double cell plate capacitor

摘要

A multi-poly spacer, double-plate, stacked capacitor or MDSC using a modified stacked capacitor storage cell fabrication process. The MDSC is made up of a rectangular boxed-shaped polysilicon storage node structure, having multiple poly post residing in a buried contact used to connect the MDSC to an active area. The polysilicon storage node structure is overlaid by polysilicon with a dielectric sandwiched in between to form a completed MDSC. Developing the MDSC from a planarized surface allows the capacitor to be fabricated with only 2 photomask steps. With the 3-dimensional shape and a texturized surface of a polysilicon storage node plate, substantial capacitor plate surface area of 100% or more is gained at the storage node.