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发明名称
LEAK IDENTIFICATION APPARATUS OF ION IMPLANTER
摘要
申请公布号
KR950004151(Y1)
申请公布日期
1995.05.22
申请号
KR19920012803U
申请日期
1992.07.11
申请人
GOLDSTAR ELECTRON CO., LTD.
发明人
KIM, HYON - SOP
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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