| 摘要 |
<p>A system for illumination of discrete specimens in an optical inspection system (A) include an image acquisition system (C) and corresponding illumination system (B). A beam splitter (16) intercepts light from a light source (10) and communicates a portion of it to field lens (20). A field lens (20), in turn, communicates light to a specimen (24) disposed in a viewing area (22). Light reflected from the specimen (24) is communicated back through the field lenses (20), through the beam splitter (16) and ultimately to a video camera (34) from which a digitized image is obtained. In another embodiment, light reflected from the specimen (24) and propagated through the beam splitter (16) has communicated to a second beam splitter (30). Separated light therefrom is communicated to first and second video cameras (34, 36), thus allowing for imaging of separate portions of the specimen (24).</p> |
