| 摘要 |
PURPOSE: To form an optical thin film having sufficient optical characteristics with a small number of layers by sputtering a target comprising silicone or a mixture of silicone and metal fluoride to form an optical thin film on a sub strate. CONSTITUTION: When the optical thin film is produced, the optical thin film is formed on a substrate such as an optical element by sputtering a target comprising silicone. Or, when an optical thin film is produced, a target comprising a mixture of silicone and metal fluoride is sputtered. Also, the optical thin film is formed to contain at least one layer produced by the production method above described. The refractive index of the obtd. optical thin film is about 1.38 to 1.42, depending on the amt. of the mixture added or film forming conditions and the obtd. film has relatively low refractive index. Therefore, a sufficient antireflection effect is obtd. even for one layer. Further, when a polarizing beam splitter or edge filter is to be formed, enough optical characteristics can be obtd. with a small number of layers. |
