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发明名称
摘要
申请公布号
JP2884164(B2)
申请公布日期
1999.04.19
申请号
JP19880179224
申请日期
1988.07.20
申请人
ORINPASU KOGAKU KOGYO KK
发明人
SAKAI ATSUSHI;MATSUMOTO KAZUYA
分类号
G01T1/20;G01T1/24;G01T1/29;H01J37/244;H01L27/14;H01L31/09;(IPC1-7):G01T1/24
主分类号
G01T1/20
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