发明名称 PRODUCTION OF ACTIVE MATRIX SUBSTRATE
摘要 <p>PROBLEM TO BE SOLVED: To make it possible to decrease photolithography stages and to prevent the degradation in the aperture ratio of pixel parts at the time of patterning transparent conductive layers. SOLUTION: This process for production includes a stage for forming a first transparent conductive layer 9, a stage for forming a metallic layer 11 on the first transparent conductive layer 9, a stage for forming source wiring and connection electrodes 110 having a two-layered structure, a stage for forming a protective layer 13, a stage for forming an interlayer insulating film 15, a stage for forming contact holes 16 on the connection electrodes on the interlayer insulating film, a stage for forming first contact parts for connection of pixel electrodes to the connection electrodes, a stage for forming a second transparent conductive layer and a stage for forming the pixel electrodes by patterning the second transparent conductive layer.</p>
申请公布号 JPH11326950(A) 申请公布日期 1999.11.26
申请号 JP19980135775 申请日期 1998.05.18
申请人 SHARP CORP 发明人 YAMAKAWA MASAYA;OKAMOTO MASAYA;KATAOKA YOSHIHARU;FUJIKAWA TAKASHI
分类号 G02F1/1345;G02F1/136;G02F1/1368;H01L21/336;H01L29/786;(IPC1-7):G02F1/136;G02F1/134 主分类号 G02F1/1345
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