| 摘要 |
PURPOSE: To obtain a substrate transferring hand which is high in hand rigidity, small in hand movement when it receives a substrate, high in natural frequency, lessened in substrate supporting interval at a substrate placing pad, and short in substrate transfer time. CONSTITUTION: A substrate transfer hand 3 is formed like an arc in cross-sectional shape conforming to the warpage of a substrate 1 when a substrate placing pad supports the substrate 1 by both the sides of the underside. The warpage of the substrate 1 supported by the substrate transfer hand 3 is set equal to that of the substrate 1 supported by the substrate placing pad 2. The substrate transfer hand 3 is of rib structure composed of thin-plate members which are joined together or a hollow body. |
