PRODUCTION METHOD FOR SILICON WAFER AND SOI WAFER, AND SOI WAFER,申请号KR1020017015281-传众专利搜索

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发明名称	PRODUCTION METHOD FOR SILICON WAFER AND SOI WAFER, AND SOI WAFER
摘要
申请公布号	KR20020019045(A)	申请公布日期	2002.03.09
申请号	KR1020017015281	申请日期	2001.11.28
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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