SEMICONDUCTOR MICRO ACTUATOR, AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To allow a moving element to be displaceably without being inclined, and reduce electric power consumption compared with that in the prior art. SOLUTION: A pressing part 32 is arranged to be displaceably thickness- directionally inside the second frame part 31 of a rectangular frame shape. The pressing part 32 is connected to the second frame part 31 via one arm piece 33 for displacing thickness-directionally the pressing part 32 by thermal expansion and shrinkage. The arm piece 33 has a flexible part 38 wherein a flexible layer 37 is layered with a flexible layer 36, and a flexible layer 38 is deflected by heating accompanied to electrification to the flexible layer 37 to displace the pressing part 32. The first frame part 21 of a rectangular shape is joined to the second frame part 31. The needle 22 displaced thickness- directionally is arranged inside the first member 21. The needle 22 is connected to the first frame part 21 by two connection pieces 23. A supporting part is constituted of the first frame part 21 and the second frame part 31.