发明名称 Method of fabricating a one-sided polysilicon thin film transistor
摘要 An asymmetrical polysilicon thin film transistor is formed above a gate electrode on a semiconductor substrate. The transistor is separated from the gate electrode by a gate oxide layer, and includes a channel region immediately above the gate electrode. Highly doped source/drain regions are formed within the polysilicon on either side of the channel region. On the drain side of the channel only, a lightly doped drain region is formed between the channel region and the highly doped drain region. The highly doped source region is immediately adjacent the channel region.
申请公布号 US6753576(B1) 申请公布日期 2004.06.22
申请号 US19940193725 申请日期 1994.02.09
申请人 STMICROELECTRONICS, INC. 发明人 SUNDARESAN RAVISHANKAR
分类号 H01L29/78;H01L21/336;H01L29/786;(IPC1-7):H01L29/76 主分类号 H01L29/78
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