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发明名称
WAFER PROBER
摘要
申请公布号
JPH0194631(A)
申请公布日期
1989.04.13
申请号
JP19870252822
申请日期
1987.10.06
申请人
CANON INC
发明人
SATO TERUYA;UKAJI TAKAO;YAMAGUCHI ATSUTO;OMORI TARO;MURAKAMI EIICHI
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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