METHOD AND DEVICE FOR WASHING ION SOURCE,申请号JP19890114929-传众专利搜索

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发明名称	METHOD AND DEVICE FOR WASHING ION SOURCE
摘要
申请公布号	JPH02295039(A)	申请公布日期	1990.12.05
申请号	JP19890114929	申请日期	1989.05.10
申请人	HITACHI LTD	发明人	UMEMURA KAORU;ISHITANI TORU
分类号	H01J27/02;H01J37/08	主分类号	H01J27/02
代理机构		代理人
主权项
地址

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