发明名称 VERFAHREN ZUM NIEDERSCHLAGEN EINER SCHICHT AUS ZINKOXID.
摘要 <p>Zinc oxide is applied to a substrate at a low temperature by using a mixture of an organozinc compound and water carried in an inert gas. The resulting zinc oxide film has a relatively low resistivity which can be varied by addition of a group III element.</p>
申请公布号 DE3687540(T2) 申请公布日期 1993.08.05
申请号 DE19863687540T 申请日期 1986.06.04
申请人 SIEMENS SOLAR INDUSTRIES L.P., CAMARILLO, CALIF., US 发明人 VIJAYAKUMAR, S., PATHAM, GRANADA HILLS CALIFORNIA 91344, US;BLAKER, KIMBERLY A., GRANADA HILLS CALIFORNIA 91344, US;WIETING, ROBERT D., SIMI VALLEY CALIFORNIA 93065, US;WONG, BOON, RESEDA CALIFORNIA, US
分类号 C23C16/50;C23C16/40;H01L21/205;H01L31/0296;H01L31/04;H01L31/18;(IPC1-7):C23C16/40;H01L31/02 主分类号 C23C16/50
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