发明名称 COMPLEMENTARY MIS TRANSISTOR DEVICE
摘要 PURPOSE:To enable a complementary MIS transistor device to be prevented from deteriorating in characteristics due to a hot carrier effect and decreasing in threshold voltage due to a short channel effect, and to enhance in response speed, and micronize. CONSTITUTION:N-type diffusion regions 21a, 22a, 21b, and 22b which are higher than a P-type well region 11a and an N-type well region 11b but lower than a source and a drain in impurity concentration and broader than the source and the drain in diffusion region in a crosswise direction are formed in a complementary MIS transistor device, where the N-type diffusion regions 21a, 22a, 21b, and 22b are extended laterally so as to reach to a point just under the end of an insulating gate 18 and to extend in a depthwise direction to reach to a point shallower than the source and the drain. A source and a drain can be lessened in junction capacitance in an N-type well region 11b, so that a complementary MIS transistor device of this design can be enhanced in response.
申请公布号 JPH05299594(A) 申请公布日期 1993.11.12
申请号 JP19920125606 申请日期 1992.04.17
申请人 NIPPONDENSO CO LTD 发明人 KATADA MITSUTAKA;MURAMOTO HIDETOSHI;FUJINO SEIJI;HATTORI TADASHI;ABE KATSUNORI
分类号 H01L21/8238;H01L27/092;(IPC1-7):H01L27/092 主分类号 H01L21/8238
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