发明名称 Composite structure used for electronic components
摘要 The composite structure comprises a single crystalline growth substrate and at least one polycrystalline diamond (-like) layer arranged on the substrate. The boundary surface (1) between the substrate (2) and the diamond layer (3) has growth seeds (4), and the axes of 50% of the seeds are tilted by up to 10 deg , esp. up to 7 deg to the corresp. axes of the crystal lattice of the substrate (2). Prodn. of the composite structure is also claimed.
申请公布号 DE4427714(A1) 申请公布日期 1996.02.15
申请号 DE19944427714 申请日期 1994.08.05
申请人 DAIMLER-BENZ AKTIENGESELLSCHAFT, 70567 STUTTGART, DE 发明人 STUBHAN, FRANK, 89584 EHINGEN, DE;FUESER, HANS-JUERGEN, DR., 89547 GERSTETTEN, DE;FERGUSON, MONA, DR., 89081 ULM, DE
分类号 C23C16/02;C23C16/27;H01L21/205;(IPC1-7):H01L21/205;C30B25/18;C30B25/02;C30B29/04;C23C16/26 主分类号 C23C16/02
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