发明名称 Coordinate position measuring device using dual-beam interferometer
摘要 In a two-beam interferometer the influence of changes in wavelength on the measurement of path length is effectively reduced by interposing a translucent, closed, incompressible body in the reference beam or the measurement beam so that when the movable measurement mirror is positioned in a certain way the portions of reference beam and measurement beam passing outside the body are of equal length.
申请公布号 DE19628969(C1) 申请公布日期 1997.10.02
申请号 DE1996128969 申请日期 1996.07.18
申请人 LEICA MIKROSKOPIE UND SYSTEME GMBH, 35578 WETZLAR, DE 发明人 RINN, KLAUS, 35452 HEUCHELHEIM, DE
分类号 G01B9/02;(IPC1-7):G01B9/02;G01B11/00 主分类号 G01B9/02
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