发明名称 |
Coordinate position measuring device using dual-beam interferometer |
摘要 |
In a two-beam interferometer the influence of changes in wavelength on the measurement of path length is effectively reduced by interposing a translucent, closed, incompressible body in the reference beam or the measurement beam so that when the movable measurement mirror is positioned in a certain way the portions of reference beam and measurement beam passing outside the body are of equal length.
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申请公布号 |
DE19628969(C1) |
申请公布日期 |
1997.10.02 |
申请号 |
DE1996128969 |
申请日期 |
1996.07.18 |
申请人 |
LEICA MIKROSKOPIE UND SYSTEME GMBH, 35578 WETZLAR, DE |
发明人 |
RINN, KLAUS, 35452 HEUCHELHEIM, DE |
分类号 |
G01B9/02;(IPC1-7):G01B9/02;G01B11/00 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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