ELECTRO-OPTICAL DEVICE, DRIVE SUBSTRATE FOR ELECTRO- OPTICAL DEVICE AND THEIR MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an active matrix substrate which incorporates a high performance driver and an electro-optical device such as a thin-film semiconductor device for a display using the same by uniformly film-forming a single-crystal silicon thin film with high electron/hole mobility at a comparatively low temperature. SOLUTION: This electro-optical device is constructed by forming a material layer 50, having suitable lattice matching with a single-crystal semiconductor on one side of a first substrate 1, by forming a molten liquid layer 6 of a low- melting metal comprising tin or lead or an alloy of tin and lead containing a semiconductor on the material layer 50. Subsequently, by subjecting a single- crystal semiconductor layer 7 to crystal growth using the material layer 50 as a seed with cooling treatment of the molten liquid layer 6 of the low-melting metal, by applying proscribed treatment to the single-crystal semiconductor layer 7 and by forming at least an active element from among active and passive elements.