MICRO PUMP DRIVEN BY PHASE CHANGE OF FLUID

摘要

PURPOSE: A micro pump driven by a phase change of a fluid is provided to realize a micro pump with a simple structure and the improved durability by pumping a fluid without an operating element. CONSTITUTION: A pumping chamber(112) has a predetermined inner space to be filled with a fluid(180). Plural fluid inflow paths(113) and a plurality of fluid outflow paths(114) are connected with the pumping chamber. A heating element(130) is installed at one side of the pumping chamber for heating the fluid inside the pumping chamber to generate bubbles(190). Electrodes(151,152) apply an electric current to the heating element. The fluid flows according to expansion and contraction of the bubbles. At least one of the fluid inflow path and the fluid outflow path has a shape changing a cross-sectional area according to a flowing direction of the fluid.