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发明名称
摘要
申请公布号
FR2365248(B1)
申请公布日期
1979.03.23
申请号
FR19770022463
申请日期
1977.07.13
申请人
IBM
发明人
分类号
H01L21/822;H01L21/82;H01L21/8238;H01L27/04;H01L27/088;H01L27/092;H01L29/78;H03K17/687;H03K19/094;H03K19/0944;H03K19/0948;(IPC1-7):H03K19/40;H03K19/08;H01L21/70;H01L27/06
主分类号
H01L21/822
代理机构
代理人
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