APPARATUS FOR PRODUCING ELECTROPHOTOGRAPHIC SENSITIVE BODY

摘要

PURPOSE:To form an electrophotographic sensitive layer having the smaller dispersion in characteristics on a cylindrical substrate by generating a glow discharge between the cylindrical substrate and counter electrode consisting of a heat pipe in a reaction vessel to decompose the gaseous raw materials introduced into the chamber. CONSTITUTION:The conductive cylindrical substrate 110 is disposed heatably and rotatably around the axis thereof on a supporting shaft 120 consisting of the heat pipe in the reaction vessel 100 which is provided with a discharge pipe 170 and permits evacuation. The counter electrode 130 consisting of a support 132 and an electrode plate 131 is further disposed around the same in such a manner that the electrode can be heated by a heater 150. The substrate 110 and the counter electrode 130 are maintained at a prescribed temp. and electric power is supplied between both by a high-frequency power source 180 to generate the glow discharge and to decompose the gaseous raw materials supplied from a gaseous raw material introducing pipe 160. The above-mentioned electrode plate 131 are constituted of plural pieces of the heat pipes so that the electrode plate is kept at the uniform temp. The uniform photosensitive layer having the smaller dispersion in the characteristics is thereby formed on the substrate 110. The electrophotographic sensitive body which forms the images having good appearance and good quality is thus obtd.