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经营范围
发明名称
VAPOR PHASE GROWTGH DEVICE FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH04116819(A)
申请公布日期
1992.04.17
申请号
JP19900237799
申请日期
1990.09.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
ITO MICHIHIRO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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