| 摘要 |
PURPOSE: To realize ideal earth and reduction of thermal resistance of a transistor simultaneously in a high output millimetric wave MMIC. CONSTITUTION: A millimetric MMIC having a coplanar matching circuit is provided with a heat dissipation metal bus 10 touching an active element disposed on the surface of a semiconductor substrate 1. A part of the metal bus is connected through a heat dissipation metal via hole 3 with the rear of the semiconductor substrate. A millimetric transistor represented by a heterojunction bipolar transistor, is employed as the active element along with a semiconductor substrate thicker than 100μm.
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